T. J. Larrabee

Tunable Electrical Properties of Vanadium Oxide by Hydrogen-Plasma-Treated Atomic Layer Deposition

S. Prokes, L. Ruppalt, J. Culbertson, 2017, ACS omega.

Plasma enhanced atomic layer deposition of textured aluminum nitride on platinized substrates for MEMS

J. Pulskamp, G. Rayner, G. Fox, 2022, Journal of Vacuum Science & Technology A.

In Situ Hydrogen Plasma Exposure for Varying the Stoichiometry of Atomic Layer Deposited Niobium Oxide Films for Use in Neuromorphic Computing Applications.

A. Kozen, M. Twigg, S. Prokes, 2020, ACS applied materials & interfaces.

Evolution of Metallicity in Vanadium Dioxide by Creation of Oxygen Vacancies

Vladimir M. Shalaev, Sharka M. Prokes, Alexandra Boltasseva, 2017 .

An atomic layer deposition reactor with dose quantification for precursor adsorption and reactivity studies.

T. Mallouk, D. Allara, T. J. Larrabee, 2013, The Review of scientific instruments.