R. Kool

Performance overview and outlook of EUV lithography systems

Marcel Beckers, Judon Stoeldraijer, Jo Finders, 2015, Advanced Lithography.

Performance optimization of MOPA pre-pulse LPP light source

Hans Meiling, Igor V. Fomenkov, Wayne J. Dunstan, 2015, Advanced Lithography.

SLICOT, a subroutine library in control and systems theory

Sven Hammarling, F. Dumortier, A.J.W. van den Boom, 1991 .

EUV lithography: NXE platform performance overview

Guido Schiffelers, Judon Stoeldraijer, Hans Meiling, 2014, Advanced Lithography.

ASML's NXE platform performance and volume introduction

Guido Schiffelers, Judon Stoeldraijer, Hans Meiling, 2013, Advanced Lithography.