R. Thapliyal

Rapid depth profiling of lead zirconate titanate (PZT) thin films by pulsed glow‐discharge optical emission spectroscopy

J. Michler, A. Fischer, T. Nelis, 2006 .

Single-target DC-pulsed deposition of lead zirconate titanate thin films: Investigation of the chemical and mechanical properties by glow-discharge optical emission spectroscopy and nanoindentation

H. Hug, J. Michler, A. Fischer, 2005 .

PZT thin film deposition on Si wafers and optical fibers prepared by reactive DC pulsed magnetron sputtering from a single metallic target

M. Amberg, H. Hug, G. Fortunato, 2005 .

PZT Films on Wafers and Fibers for MEMS Application

M. Amberg, H. Hug, G. Fortunato, 2006, 2006 15th ieee international symposium on the applications of ferroelectrics.