Y. Matsu

SOI micromachined 5-axis motion sensor using resonant electrostatic drive and non-resonant capacitive detection mode

T. Mineta, Yoshiyuki Watanabe, K. Okada, 2005 .

Development of 6-axis Motion Sensors Using Piezoelectric Elements

S. Sugiyama, Hiromichi Itano, K. Okada, 2004 .

STABILIZATION AGAINST RESISTANCE DEGRADATION OF SrTiO3 THIN FILMS BY Er DOPING

R. Kita, Y. Matsu, S. Yano, 1999 .

SOI micromachined 5-axis motion sensor using resonant electrostatic drive and non-resonant capacitive detection mode

K. Okada, T. Mineta, T. Mineta, 2005, The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05..