D. Löffelmacher

An emittance scanning device for liquid metal ion sources

H. Bukow, A. Stephan, C. Rolfs, 1998 .

Challenges and current status in 300 mm rapid thermal processing

W. Lerch, M. Glück, D. Löffelmacher, 1999 .

Layout of a nuclear microprobe beamline using a liquid metal ion source

H. Bukow, A. Stephan, C. Rolfs, 1997 .

INVESTIGATION OF THE RESOLUTION AFFECTING PARAMETERS OF A NUCLEAR MICROPROBE USING A SOLENOID LENS

H. Bukow, A. Stephan, C. Rolfs, 1996 .