Seokyoung Park
发表
Study on Improving Surface Structure with Changing RF Power Conditions in RIE (reactive ion etching)
Hee‐eun Song,
Gi-Hwan Kang,
H. Chang,
2016
.
K. Shin,
KwangSup Eom,
J. Sohn,
2022,
Chemical Engineering Journal.
Jong-Ryul Lee,
Sang-Hoon Lee,
Kyoohyun Lim,
2017,
ESSCIRC 2017 - 43rd IEEE European Solid State Circuits Conference.