R. Garreis

Imaging budgets for extreme ultraviolet optics: ready for 22-nm node and beyond

T. Heil, P. Gräupner, M. Bienert, 2009 .

90 degree optical hybrid for coherent receivers

Reiner Garreis, R. Garreis, 1991, Other Conferences.

Impact of wavefront errors on low k1 processes at extremely high NA

Reiner Garreis, Donis G. Flagello, Aksel Goehnermeier, 2003, SPIE Advanced Lithography.

Optical lithography in the sub-50-nm regime

Robert John Socha, Reiner Garreis, Donis G. Flagello, 2004, SPIE Advanced Lithography.