Gary Z. Li

Fluence-dependent sputtering yield of micro-architectured materials

Christopher S. R. Matthes, R. Wirz, D. Goebel, 2017 .

In situ plasma sputtering and angular distribution measurements for structured molybdenum surfaces

Christopher S. R. Matthes, R. Wirz, D. Goebel, 2017 .

In situ microscopy for plasma erosion of complex surfaces.

R. Wirz, A. Ottaviano, Zhitong Chen, 2021, The Review of scientific instruments.

Implementation of in situ diagnostics for sputter yield measurements in a focused plasma

R. Wirz, D. Goebel, T. Matlock, 2016 .