W. Rehak

Plasma Diagnostics in rf Discharges Using Nonlinear and Resonance Effects

M. Klick, Michael Klick, Wolfgang Rehak, 1997 .

Influence of excitation frequency on plasma parameters and etching characteristics of radio-frequency discharges

M. Klick, M. Kammeyer, H. Mischke, 1999 .

Innovative plasma diagnostics and control of process in reactive low-temperature plasmas

G. Franz, P. Awakowicz, M. Klick, 1998 .

Self-consisting modeling of plasma density control using self-excited electron resonance spectroscopy

R. Brinkmann, W. Rehak, K. Klick, 1998, 25th Anniversary, IEEE Conference Record - Abstracts. 1998 IEEE International Conference on Plasma Science (Cat. No.98CH36221).

Determination of airborne mercury-203

W. Rehak, G. Ubl, 1974 .