H. Matsuo

Plasma-Enhanced Co-Polymerization of Organo-siloxane and Hydrocarbon for Low-k/Cu Interconnects

T. Kikkawa, Y. Hayashi, A. Ishikawa, 2007 .

Influence of CMP Chemicals on the Properties of Porous Silica Low-k Films

T. Kikkawa, A. Ishikawa, N. Hata, 2006 .

Theoretical Investigation of Dielectric Constant and Elastic Modulus of Three-Dimensional Isotropic Porous Silica Films with Cubic and Disordered Pore Arrangements

T. Kikkawa, N. Hata, Kazuhiro Yamada, 2005 .

Theoretical Analysis of Elastic Modulus and Dielectric Constant for Low-k Two-Dimensional Periodic Porous Silica Films

T. Kikkawa, N. Hata, Kazuhiro Yamada, 2004 .

Visualization of Acoustic Waves and Cavitation in Ultrasonic Water Flow

K. Ando, H. Matsuo, Hidehisa Usui, 2021 .

Theoretical Investigation of Dielectric Constant and Elastic Modulus of Two-Dimensional Periodic Porous Silica Films with Elliptical Cylindrical Pores

T. Kikkawa, N. Hata, Kazuhiro Yamada, 2005 .