M. Tsukihara

Introduction of the MC3-II/GP system, medium current ion implanter with enhanced multi-charge beam current

Michiro Sugitani, Mitsukuni Tsukihara, Makoto Sano, 2012 .

Estimation of plasma density distribution in IHC source by means of FEM calculation

M. Sato, H. Kawaguchi, M. Tsukihara, 2014, 2014 20th International Conference on Ion Implantation Technology (IIT).

Automatic generation of pressure compensation factors

M. Tsukihara, Makoto Sano, H. Kariya, 1999, 1998 International Conference on Ion Implantation Technology. Proceedings (Cat. No.98EX144).

Monitoring system for silicon coating thickness of disk

M. Tsukihara, M. Sugitani, M. Kabasawa, 2000, 2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 (Cat. No.00EX432).