I. Suni

Investigation of Ionic Contamination Removal from Silicon Dioxide Surfaces

A. Busnaina, H. Lin, I. Suni, 2002 .

Cleaning of high aspect ratio submicron trenches

A. Busnaina, Hong Lin, I. Suni, 2002, 13th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference. Advancing the Science and Technology of Semiconductor Manufacturing. ASMC 2002 (Cat. No.02CH37259).

Amorphous Phase Formation and Recrystallization in Ion-Implanted Silicides

C. A. Hewett, S. Lau, L. Hung, 1983 .

Transfer of thin Si layers by cold and thermal ion cutting

Hannu Luoto, S. Karirinne, T. Suni, 2003 .

Si-On-Sapphire and Si Implanted with Zr Ions: Lattice Location, Solid Phase Epitaxial Regrowth, and Electrical Properties

I. Suni, Ilan Golecki, 1982 .