Mutsuhiro Tanaka

Growth of Thick AlN Layer by Hydride Vapor Phase Epitaxy

K. Hiramatsu, H. Miyake, Yuhuai Liu, 2005 .

High‐quality AlN epitaxial films on (0001)‐faced sapphire and 6H‐SiC substrate

K. Hiramatsu, H. Katsukawa, O. Oda, 2003 .

High temperature growth of AlN film by LP-HVPE

K. Hiramatsu, H. Miyake, Yuhuai Liu, 2007 .

Fabrication of thick AlN film by low pressure hydride vapor phase epitaxy

K. Hiramatsu, H. Miyake, Yuhuai Liu, 2006 .