I. Han

Improvement of properties of dynamic random access memories capacitors by PH3 plasma doping process after the formation of hemispherical-grained silicon

C. Hwang, S. Woo, H. Moon, 1999 .

Pulsed CVD-W Nucleation Layer Using WF6 and B2H6 for Low Resistivity W

H. Kim, Sungmin Kim, S. Ryu, 2009 .

Change in the resistivity of Ge-doped Sb phase change thin films grown by chemical vapor deposition according to their microstructures

Byung Joon Choi, C. Hwang, J. Roh, 2009 .

Interval Scan Inspection Technique for Contact Failure of Advanced DRAM Process using Electron Beam-Inspection System

Mari Nozoe, D. Y. Mun, J. H. Oh, 2012 .