F. Uchida

Dark‐field imaging in hard x‐ray scanning microscopy

Yoshio Suzuki, F. Uchida, Yoshio Suzuki, 1995 .

Hard x‐ray microprobe with total‐reflection mirrors

Fumihiko Uchida, Yoshio Suzuki, F. Uchida, 1992 .

X-Ray Microprobe with a Pair of Elliptical Mirrors

Yasuharu Hirai, Fumihiko Uchida, Yoshio Suzuki, 1989 .

Analysis of SiO2-to-Si3N4 selectivity in reactive ion etching using additional O2 gas

F. Yano, M. Kojima, M. Matsui, 2002 .

Low-energy Ion-scattering Spectroscopic Analysis of Structural Damage in Si Substrate under Ultrathin SiO2 after Gate Etching

M. Matsui, F. Uchida, T. Umezawa, 1999 .