H. Nordby

SiC epitaxial layer growth in a novel multi-wafer vapor-phase epitaxial (VPE) reactor

M. O'loughlin, A. Burk, H. Nordby, 1999 .

Multi-Wafer VPE Growth of Highly Uniform SiC Epitaxial Layers

M. O'loughlin, A. Burk, H. Nordby, 1999 .