Steven E. Steen

Hybrid lithography: The marriage between optical and e-beam lithography. A method to study process integration and device performance for advanced device nodes

Steven E. Steen, Sharee J. McNab, Lidija Sekaric, 2006 .

Three-dimensional integrated circuits

Arvind Kumar, Steven E. Steen, Anna W. Topol, 2006, IBM J. Res. Dev..

Overlay as the key to drive wafer scale 3D integration

Steven E. Steen, Anna W. Topol, David J. Frank, 2007 .