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Effect of Trimethyl-aluminum Preflow on The Structure and Strain Properties of AlN Films

H. Jiang, H. Jia, Chen Y.-R., 2012 .

Deposition of AlN films on nitrided sapphire substrates by reactive DC magnetron sputtering

H. Jiang, H. Jia, Chen Y.-R., 2012 .

Study of AlN films doped by Si thermal diffusion

H. Jiang, Chen Y.-R., Sun X.-J., 2012 .