N. Handa

Droplet Evaporation and Watermark Formation on Si Wafers with Various Films

A. Fukunaga, A. Yano, K. Amagai, 2020 .

Fundamental study of air flow effects on liquid removal from wafer surface

A. Fukunaga, K. Amagai, Satomi Hamada, 2014, Proceedings of International Conference on Planarization/CMP Technology 2014.

Experimental and Modelling Investigation of Re-Adhesion Mechanism of Detached Nanoparticles to Wafer Surface in Spin Rinse Process

N. Handa, K. Amagai, H. Hiyama, 2020 .