P. Vermont

Integration of aluminium oxide as a passivation layer in a high efficiency industrial process on n-type silicon solar cells

Y. Veschetti, R. Cabal, X. Pagès, 2011, 2011 37th IEEE Photovoltaic Specialists Conference.

(Invited) High Throughput ALD of Al2O3 Layers for Surface Passivation of Silicon Solar Cells

E. Granneman, V. Kuznetsov, K. Vanormelingen, 2010 .

Excellent rear side passivation on multi-crystalline silicon solar cells with 20 nm uncapped Al2O3 layer: Industrialization of ALD for solar cell applications

E. Tois, E. Granneman, L. J. Geerligs, 2010, 2010 35th IEEE Photovoltaic Specialists Conference.

Wafer temperature measurement in conduction-based RTP systems

E. Granneman, X. Pagès, K. Vanormelingen, 2008, 2008 16th IEEE International Conference on Advanced Thermal Processing of Semiconductors.

High-Throughput Solar Cell Passivation on In-Line Levitrack ALD Al2O3 System - Demonstration of Process Performance

E. Granneman, V. Kuznetsov, P. Vermont, 2011 .