M. Roure

GaAs WET and Siconi Cleaning Sequences for an Efficient Oxide Removal

P. Besson, V. Loup, Mickael Martin, 2019, ECS Journal of Solid State Science and Technology.

300 mm InGaAsOI substrate fabrication using the Smart CutTM technology

F. Fournel, C. Morales, J. Widiez, 2015, 2015 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S).

InGaAs-OI Substrate Fabrication on a 300 mm Wafer

S. Sollier, J. Widiez, F. Fournel, 2016 .

Study of an Al2O3/GaN Interface for Normally Off MOS-Channel High-Electron-Mobility Transistors Using XPS Characterization: The Impact of Wet Surface Treatment on Threshold Voltage VTH

R. Gwoziecki, C. Le Royer, S. Bécu, 2021, ACS Applied Electronic Materials.

CVD Growth and Passivation of W and TiN Nanocrystals for Non-volatile Memory Applications

G. Molas, J. Colonna, D. Lafond, 2010 .

Digital Etching of GaAs Materials: Comparison of Oxidation Treatments

P. Besson, L. Toselli, E. Martinez, 2016 .

Hybrid III–V/Silicon Technology for Laser Integration on a 200-mm Fully CMOS-Compatible Silicon Photonics Platform

Karim Hassan, Bertrand Szelag, Christophe Jany, 2019, IEEE Journal of Selected Topics in Quantum Electronics.

Si and SiGe Alloys Wet Etching Using TMAH Chemistry

P. Besson, S. Petitdidier, L. Gabette, 2013 .