T. W. Kenny

发表

G. M. Rebeiz, M. A. Philippine, H. Zareie, 2013, 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII).

Encapsulated inertial systems

T. W. Kenny, C. H. Ahn, D. L. Christensen, 2016, 2016 IEEE International Electron Devices Meeting (IEDM).

A single process for building capacitive pressure sensors and timing references with precise control of released area using lateral etch stop

T. W. Kenny, Chia-Fang Chiang, T. Kenny, 2012, 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS).

Parametric drive of a toroidal MEMS rate integrating gyroscope demonstrating < 20 PPM scale factor stability

T. W. Kenny, A. M. Shkel, E. J. Ng, 2015, 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS).

VARIATION OF CAPILLARY WALL POTENTIAL IN ELECTROKINETIC FLOW

T. W. Kenny, A. E. Herr, M. G. Mungal, .

Electrostatic Tuning to Achieve Higher Stability Microelectromechanical Composite Resonators

T. W. Kenny, Bongsang Kim, M. A. Hopcroft, 2011, Journal of Microelectromechanical Systems.

Generation of intense tunable picosecond pulses in the far‐infrared

Paul L. Richards, Mark A. Berg, T. W. Kenny, 1985 .

Sub-10 nanometer uncooled platinum bolometers via plasma enhanced atomic layer deposition

T. W. Kenny, O. Ambacher, F. Purkl, 2013, 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS).

X-Y and Z-axis capacitive accelerometers packaged in an ultra-clean hermetic environment

T. W. Kenny, D. L. Christensen, D. B. Heinz, 2013, 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII).

Resonant pressure sensor with on-chip temperature and strain sensors for error correction

T. W. Kenny, E. J. Ng, A. B. Graham, 2013, 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS).

Wide-range temperature dependence studies for devices limited by thermoelastic dissipation and anchor damping

T. W. Kenny, E. J. Ng, C. H. Ahn, 2017, 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS).

On-chip ovenization of encapsulated Disk Resonator Gyroscope (drg)

T. W. Kenny, Y. Chen, V. A. Hong, 2015, 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS).

Capacitive sensor fusion: Co-fabricated X/Y and Z-axis accelerometers, pressure sensor, thermometer

T. W. Kenny, D. B. Heinz, V. A. Hong, 2015, 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS).

Stable Operation of MEMS Oscillators Far Above the Critical Vibration Amplitude in the Nonlinear Regime

T. W. Kenny, S. Yoneoka, R. Melamud, 2011, Journal of Microelectromechanical Systems.

Epitaxially-encapsulated polysilicon disk resonator gyroscope

T. W. Kenny, D. A. Horsley, E. J. Ng, 2013, 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS).

Localized, degenerately doped epitaxial silicon for temperature compensation of resonant MEMS systems

T. W. Kenny, V. A. Hong, E. J. Ng, 2013, 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII).

100K Q-factor toroidal ring gyroscope implemented in wafer-level epitaxial silicon encapsulation process

T. W. Kenny, S. Askari, A. M. Shkel, 2014, 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS).