Benjamin Lenz

Virtual Metrology in Semiconductor Manufacturing by Means of Predictive Machine Learning Models

Bernd Barak, Benjamin Lenz, Julia Mührwald, 2013, 2013 12th International Conference on Machine Learning and Applications.

Development of smart feature selection for advanced virtual metrology

Bernd Barak, Benjamin Lenz, Carolin Leicht, 2014, 25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2014).

Data Mining and Support Vector Regression Machine Learning in Semiconductor Manufacturing to Improve Virtual Metrology

Bernd Barak, Benjamin Lenz, 2013, 2013 46th Hawaii International Conference on System Sciences.

Regression methods for prediction of PECVD Silicon Nitride layer thickness

Hendrik Purwins, Bernd Barak, Ahmed Nagi, 2011, 2011 IEEE International Conference on Automation Science and Engineering.