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Reactive-ion etching of tungsten for high-resolution x-ray masks

Martin C. Peckerar, Charles R. Eddy, Christie R. Marrian, 1994, Advanced Lithography.

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T. Kwan, S. Gold, H. Freund, 1983 .

Use of induced spatial incoherence for uniform illumination of laser fusion targets

Stephen E. Bodner, N. Nocerino, S. P. Obenschain, 1983 .