H. Hada

High-performance and damage-free magnetic film etching using pulse-time-modulated Cl/sub 2/ plasma

H. Yoda, S. Tahara, T. Mukai, 2005, Digest of Papers Microprocesses and Nanotechnology 2005.

Magnetic Tunnel Junction (MTJ) Patterning for Magnetic Random Access Memory (MRAM) Process Applications

Shuichi Tahara, Nobuyuki Ishiwata, Tomonori Mukai, 2003 .