S. Wi

Fabrication of free-standing nanoscale SiN membranes with enhanced burst pressure via improved etching process

Hyeon-Jin Shin, I. Park, Jinho Ahn, 2019, Sensors and Actuators A: Physical.

Investigation of the Mechanical/Thermal Properties of Nano-Scale Silicon Nitride Membranes

H. Shin, Jinho Ahn, Y. Jang, 2019, Korean Journal of Metals and Materials.

Investigating the Degradation of EUV Transmittance of an EUV Pellicle Membrane

Jinho Ahn, S. Wi, S. Kim, 2022, Membranes.

Investigation of the Resistivity and Emissivity of a Pellicle Membrane for EUV Lithography

Kyeongjae Cho, Jinho Ahn, Haneul Kim, 2022, Membranes.