T. Olawumi

Investigation of Argon Plasma Damage on Ultra Low-κ Dielectrics

J. Bartha, H. Ruelke, U. Mayer, 2015 .

Modification of Ultra Low-k Dielectric Films by O2 and CO2 Plasmas

C. Detavernier, F. Lazzarino, J. Bartha, 2015 .