Fan Zhang

Fourier Transform Infrared Spectroscopy of Low-k Dielectric Material on Patterned Wafers

Handong Sun, Zexiang Shen, Z. Mai, 2012 .

Fourier Transform Infrared Spectroscopy of Low-k Dielectric Material on Patterned Wafers

Handong Sun, Zexiang Shen, Z. Mai, 2012 .

Evidence of ultra-low-k dielectric material degradation and nanostructure alteration of the Cu/ultra-low-k interconnects in time-dependent dielectric breakdown failure

Fan Zhang, Jeffrey Lam, Zexiang Shen, 2013 .