K. Norimatsu

High-quality AlN/sapphire templates prepared by thermal cycle annealing for high-performance ultraviolet light-emitting diodes

H. Miyake, Ding Wang, K. Uesugi, 2021 .

Low dislocation density AlN on sapphire prepared by double sputtering and annealing

H. Miyake, Ding Wang, K. Uesugi, 2020, Applied Physics Express.

Crystalline quality improvement of face-to-face annealed MOVPE-grown AlN on vicinal sapphire substrate with sputtered nucleation layer

S. Kuboya, H. Miyake, K. Uesugi, 2020 .

Effect of the Electron-Irradiation-Induced-Contamination of the Etching Process of a Photoresist

M. Miyoshi, K. Okumura, K. Norimatsu, 1987 .