Lothar Pfitzner

Virtual metrology for prediction of etch depth in a trench etch process

Martin Schellenberger, Georg Roeder, Lothar Pfitzner, 2013, ASMC 2013 SEMI Advanced Semiconductor Manufacturing Conference.

Process Optimization by Means of Integrated Monitoring Tools in the Semiconductor Industry

Martin Schellenberger, Andreas Nutsch, Lothar Pfitzner, 2007 .

Feasibility Evaluation of Virtual Metrology for the Example of a Trench Etch Process

Martin Schellenberger, Georg Roeder, Lothar Pfitzner, 2014, IEEE Transactions on Semiconductor Manufacturing.

Metrology, Analysis and Characterization in Micro- and Nanotechnologies - A European Challenge

Lothar Pfitzner, A. Nutsch, Markus Pfeffer, 2007 .

Virtual Equipment Engineering: A continuous simulation chain leveraging development of new semiconductor manufacturing equipment

Martin Schellenberger, Lothar Pfitzner, Andreas Mattes, 2010, 2010 International Symposium on Semiconductor Manufacturing (ISSM).

Trends in european R&D : Advanced process control down to atomic scale for micro-and nanotechnologies

Martin Schellenberger, Georg Roeder, Lothar Pfitzner, 2006 .