Jean-Christophe Imbert

发表

Experimental study of a pre-ionized high power pulsed magnetron discharge

P. Vašina, L. Poucques, M. Ganciu, 2007 .

Study of the transport of titanium neutrals and ions in the post-discharge of a high power pulsed magnetron sputtering device

M. Ganciu, J. Bretagne, L. De Poucques, 2006 .

Spatial characterization of an IPVD reactor: neutral gas temperature and interpretation of optical spectroscopy measurements

P. Vašina, J. Bretagne, L. De Poucques, 2005 .

Recent Developments on Ionized Physical Vapour Deposition: Concepts, Determination of the Ionisation Efficiency and Improvement of Deposited Films

M. Hugon, P. Vašina, O. Voldoire, 2004 .

IPVD deposition of titanium based thin films

M. Hugon, O. Voldoire, L. Poucques, 2005 .

Experimental study of a radio-frequency Ionized Physical Vapour Deposition process: Contamination by the internal coil

M. Hugon, L. Poucques, J. Bretagne, 2008 .

Analysis of the Transport of Ionized Titanium Atoms in a Highly Ionized Sputter Deposition Process

P. Vašina, L. Poucques, M. Ganciu, 2007 .