A. Lopp

6.2: Layer‐Thickness Simulation for Static Thin‐Film Deposition on Gen6/Gen7 Substrates

M. König, T. Stolley, M. Hanika, 2005 .

Transparent and conductive ZnO:Al films deposited by large area reactive magnetron sputtering

Xin Jiang, B. Szyszka, V. Sittinger, 2003 .

P‐29: Erosion Calculation for Sputtering Cathodes

Hartmut Claus, Andreas Lopp, Manfred Ruske, 2002 .