Hideo Kobayashi

Nanohole and dot patterning processes on quartz substrate by R–θ electron beam lithography and nanoimprinting

Takashi Sato, K. Taniguchi, Kouta Suzuki, 2016 .

A master-mold fabrication by electron beam lithography followed by nanoimprinting and self-aligned double patterning

Takashi Sato, Kouta Suzuki, Tsuyoshi Watanabe, 2014 .

Design features of an ultrahigh-vacuum electron microscope for REM-PEEM studies of surfaces

Y. Kondo, K. Yagi, Kunio Kobayashi, 1991 .

Development of low damage mask making process on EUV mask with thin CrN buffer layer

Hideo Kobayashi, Osamu Nagarekawa, Morio Hosoya, 2005, SPIE Advanced Lithography.