Usama Zaghloul

Assessment of dielectric charging in electrostatically driven MEMS devices: A comparison of available characterization techniques

H. Wang, Patrick Pons, Robert Plana, 2010, Microelectron. Reliab..

Dielectric charging in silicon nitride films for MEMS capacitive switches: Effect of film thickness and deposition conditions

Patrick Pons, Robert Plana, Fabio Coccetti, 2009, Microelectron. Reliab..

On the reliability of electrostatic NEMS/MEMS devices: Review of present knowledge on the dielectric charging and stiction failure mechanisms and novel characterization methodologies

Bharat Bhushan, Patrick Pons, Robert Plana, 2011, Microelectron. Reliab..

Voltage and temperature effect on dielectric charging for RF-MEMS capacitive switches reliability investigation

Patrick Pons, Robert Plana, Fabio Coccetti, 2008, Microelectron. Reliab..

Kelvin probe force microscopy-based characterization techniques applied for electrostatic MEMS/NEMS devices and bare dielectric films to investigate the dielectric and substrate charging phenomena

Patrick Pons, Robert Plana, Bharat Bhushan, 2011 .

Nanotribology-based novel characterization techniques for the dielectric charging failure mechanism in electrostatically actuated NEMS/MEMS devices using force-distance curve measurements.

Patrick Pons, Robert Plana, Bharat Bhushan, 2012, Journal of colloid and interface science.

Sub-1-volt Piezoelectric Nanoelectromechanical Relays With Millivolt Switching Capability

Gianluca Piazza, Usama Zaghloul, G. Piazza, 2014, IEEE Electron Device Letters.

A systematic reliability investigation of the dielectric charging process in electrostatically actuated MEMS based on Kelvin probe force microscopy

Patrick Pons, Robert Plana, Fabio Coccetti, 2010 .