Yasuhiro Hidaka

Error analysis and compensation method of focus detection in exposure apparatus.

Yasuhiro Hidaka, Kiyoshi Uchikawa, Daniel G Smith, 2009, Journal of the Optical Society of America. A, Optics, image science, and vision.

Lighting fixture using the Led

Yasuhiro Hidaka, Takuya Nakatani, Yoshiro Goto, 2005 .

Rotational micromachining tool controlled by optical radiation pressure

Takashi Miyoshi, Yasuhiro Takaya, Kenji Shirai, 2003, International Symposium on Laser Precision Microfabrication.

Error budgets for the image degradation of x-ray telescope on board Astro-E2

Hideyuki Mori, Ryo Iizuka, Yoshitomo Maeda, 2003, SPIE Astronomical Telescopes + Instrumentation.

A breakthrough on throughput and accuracy limitation in ellipsometry using self-interference holographic analysis

Yasuhiro Hidaka, Myungjun Lee, Mitsunori Numata, 2021, Advanced Lithography.

X-ray telescope onboard Astro-E. III. Guidelines to performance improvements and optimization of the ray-tracing simulator.

Hideyuki Mori, Manabu Ishida, Hideyo Kunieda, 2005, Applied optics.