Daniel G Smith

Error analysis and compensation method of focus detection in exposure apparatus.

Yasuhiro Hidaka, Kiyoshi Uchikawa, Daniel G Smith, 2009, Journal of the Optical Society of America. A, Optics, image science, and vision.

Generalized method for sorting Shack-Hartmann spot patterns using local similarity.

Daniel G Smith, John E Greivenkamp, 2008, Applied optics.