Ivo W. Rangelow

Field-emission scanning probe lithography with self-actuating and self-sensing cantilevers for devices with single digit nanometer dimensions

Mervyn E Jones, Eberhard Manske, Martin Hofmann, 2018, Advanced Lithography.

Atomic force microscope integrated into a scanning electron microscope for fabrication and metrology at the nanometer scale

Martin Hofmann, Tzvetan Ivanov, Alexander Reum, 2019, Photomask Technology.

Shear force microscopy using piezoresistive cantilevers in surface metrology

Teodor Gotszalk, Piotr Grabiec, Andrzej Sierakowski, 2014, Other Conferences.

Integrated soft UV-nanoimprint lithography in a nanopositioning and nanomeasuring machine for accurate positioning of stamp to substrate

Stefan Sinzinger, Martin Hoffmann, Eberhard Manske, 2019, Advanced Lithography.

High-resolution tri-level process by downstream-microwave rf-biased etching

Ivo W. Rangelow, 1991, Other Conferences.

Thermal imaging of microwave power GaAs-FET with scanning thermal nanoprobe

Teodor Gotszalk, Klaus Edinger, Paweł Janus, 2002, SPIE Optics + Photonics.

High throughput AFM inspection system with parallel active cantilevers

Martin Hofmann, Eberhard Manske, Tzvetan Ivanov, 2019, Photomask Technology.

Fabrication of optical nanodevices through field-emission scanning probe lithography and cryogenic etching

Arda D. Yalcinkaya, Martin Hofmann, Cemal Aydogan, 2018, Advanced Lithography.

Active Cantilevers with Diamond-Tip for Field Emission Scanning Probe Lithography and Imaging

Tzvetan Ivanov, Ivo W. Rangelow, Mathias Holz, 2019, 2019 IEEE International Conference on Mechatronics (ICM).