M. Stocker

Addressing Quality Assurance Issues in 3D Firearm and Toolmark Imaging | NIST

Thomas B. Renegar, Xiaoyu A. Zheng, Johannes A. Soons, 2018 .

Development of large aperture projection scatterometry for catalyst loading evaluation in proton exchange membrane fuel cells

R. Silver, B. Barnes, M. Sohn, 2017 .

Optical critical dimension measurement of silicon grating targets using back focal plane scatterfield microscopy

Heather Patrick, Bryan M. Barnes, Ronald G. Dixson, 2008 .

Köhler illumination for high-resolution optical metrology

Richard M. Silver, Lowell P. Howard, Yeung Joon Sohn, 2006, SPIE Advanced Lithography.

Koehler Illumination for High-Resolution Optical Metrology | NIST

L. Howard, R. Silver, B. Barnes, 2006 .

International photomask linewidth comparison by NIST and PTB

W. Häßler-Grohne, C. G. Frase, B. Bodermann, 2008, Photomask Technology.