S. Waid

Focused ion beam direct patterning of hardmask layers

E. Bertagnolli, M. Gavagnin, H. Wanzenboeck, 2014 .

Generation of 3D nanopatterns with smooth surfaces

E. Bertagnolli, M. Gavagnin, H. Wanzenboeck, 2014, Nanotechnology.

Performance of neutron-irradiated 4H-silicon carbide diodes subjected to alpha radiation

J. M. Rafí, T. Bergauer, G. Pellegrini, 2022, Journal of Instrumentation.

Substituted triphenylamines as building blocks for star shaped organic electronic materials

I. Kymissis, E. Bertagnolli, M. Marchetti‐Deschmann, 2015 .

Focused-ion-beam-inflicted surface amorphization and gallium implantation—new insights and removal by focused-electron-beam-induced etching

E. Bertagnolli, H. Wanzenboeck, S. Waid, 2011, Nanotechnology.

Chlorine based focused electron beam induced etching: A novel way to pattern germanium

E. Bertagnolli, H. Wanzenboeck, M. M. Shawrav, 2016 .

Inverse modeling of FIB milling by dose profile optimization

Gerhard Hobler, Emmerich Bertagnolli, G. Hobler, 2014 .

Charge collection efficiency study on neutron-irradiated planar silicon carbide diodes via UV-TCT

T. Bergauer, M. Villa, R. Thalmeier, 2022, Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment.

Focused Ion Beam Lithography

Heinz D. Wanzenboeck, H. Wanzenboeck, Simon Waid, 2011 .

Optimization of 3D patterning by Ga implantation and reactive ion etching (RIE) for nanoimprint lithography (NIL) stamp fabrication

E. Bertagnolli, H. Wanzenboeck, M. Muehlberger, 2012 .

Focused ion beam induced Ga-contamination—An obstacle for UV-nanoimprint stamp repair?

E. Bertagnolli, M. Gavagnin, H. Wanzenboeck, 2013 .

Nanoimprint lithography stamp modification utilizing focused ion beams

Iris Bergmair, Heinz D. Wanzenboeck, Emmerich Bertagnolli, 2009 .

Focused Electron Beam-Induced CVD of Iron: a Practical Guide for Direct Writing†

E. Bertagnolli, M. Gavagnin, H. Wanzenboeck, 2014 .