Dale A. Harrison

Modeling of optical constants of materials comprising photolithographic masks in the VUV

Giang T. Dao, Dale A. Harrison, John C. Lam, 1999, Photomask Technology.

Innovations in lithography metrology for characterization of phase-shift mask materials

Dale A. Harrison, John C. Lam, A. Rahim Forouhi, 2001, SPIE Photomask Technology.

Impact of thin film metrology on the lithographic performance of 193-nm bottom antireflective coatings

Chris A. Mack, Dale A. Harrison, Phillip Walsh, 2007, SPIE Advanced Lithography.

Cross-linking thin film characterization technique for data storage, semiconductor, and flat panel display devices

Kai Zhang, Dale A. Harrison, Shiva Prakash, 1999, Photonics West.