Jau-Shi Jay Jun

Comparison of edge detection methods using a prototype overlay calibration artifact

Richard M. Silver, Jau-Shi Jay Jun, Edward Kornegay, 2001, SPIE Advanced Lithography.

New method to enhance overlay tool performance

Egon Marx, Mark P. Davidson, Richard M. Silver, 2003, SPIE Advanced Lithography.

High-resolution optical overlay metrology

Egon Marx, Mark P. Davidson, Richard M. Silver, 2004, SPIE Advanced Lithography.

Atomic-resolution measurements with a new tunable diode laser-based interferometer

Carsten P. Jensen, Satoshi Gonda, Richard M. Silver, 2004 .