Kevin H.-L. Chau

Single-chip 1×84 MEMS mirror array for optical telecommunication applications

Tony Chen, Thor N. Juneau, T. Brosnihan, 2003, SPIE MOEMS-MEMS.

Technology for the high-volume manufacturing of integrated surface-micromachined accelerometer products

Kevin H.-L. Chau, Robert E. Sulouff, 1998 .

Over-range behavior of sealed-cavity polysilicon pressure sensors

Kevin H.-L. Chau, P. R. Harris, Clifford D. Fung, 1991 .

An integrated force-balanced capacitive accelerometer for low-g applications

Stephen F. Bart, Roger T. Howe, Kevin H.-L. Chau, 1996 .

An Integrated Force-balanced Capacitive Accelerometer For Low-G Applications

Stephen F. Bart, Roger T. Howe, Kevin H.-L. Chau, 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.

A versatile polysilicon diaphragm pressure sensor chip

Kevin H.-L. Chau, Clifford D. Fung, P. R. Harris, 1991, International Electron Devices Meeting 1991 [Technical Digest].