Michael W. Judy

Single-chip 1×84 MEMS mirror array for optical telecommunication applications

Tony Chen, Thor N. Juneau, T. Brosnihan, 2003, SPIE MOEMS-MEMS.

Mode-matched MEMS Coriolis vibratory gyroscopes: Myth or reality?

Thomas W. Kenny, Igor P. Prikhodko, Michael W. Judy, 2016, 2016 IEEE/ION Position, Location and Navigation Symposium (PLANS).

A modular process for integrating thick polysilicon MEMS devices with sub-micron CMOS

Roger T. Howe, Sunil A. Bhave, John A. Yasaitis, 2003, SPIE MOEMS-MEMS.

Three-terminal test structure to measure stiction force using I-V data

Enakshi Bhattacharya, Jack Martin, Michael W. Judy, 2001, SPIE Micro + Nano Materials, Devices, and Applications.

In-run bias self-calibration for low-cost MEMS vibratory gyroscopes

Igor P. Prikhodko, Carey Merritt, Michael W. Judy, 2014, 2014 IEEE/ION Position, Location and Navigation Symposium - PLANS 2014.

Integration of organic field-effect transistors and rubbery pressure sensors for artificial skin applications

Roger T. Howe, Michael W. Judy, Steven J. Sherman, 2003 .

The micromechanical device and method for manufacturing a micro-mechanical device layer

Michael W. Judy, Bruce K. Wachtmann, 2004 .

Overcoming limitations of Rate Integrating Gyroscopes by virtual rotation

Igor P. Prikhodko, Michael W. Judy, Jeffrey A. Gregory, 2016, 2016 IEEE International Symposium on Inertial Sensors and Systems.

Self-adjusting microstructures (SAMS)

Albert P. Pisano, Young-Ho Cho, Roger T. Howe, 1991, [1991] Proceedings. IEEE Micro Electro Mechanical Systems.