Alexander Starikov

发表

Special Section Guest Editorial: Metrology and Inspection for 3-D Integrated Circuits and Interconnects

Alexander Starikov, Yi-Sha Ku, 2014 .

Accuracy of overlay measurements: tool and mark asymmetry effects

Alexander Starikov, Daniel J. Coleman, Patricia J. Larson, 1990, Advanced Lithography.

Applications of image diagnostics to metrology quality assurance and process control

Alexander Starikov, James E. Potzick, Mark P. Davidson, 2003, SPIE Advanced Lithography.

Use Of A Single Size Square Serif For Variable Print Bias Compensation In Microlithography: Method, Design, And Practice

Alexander Starikov, 1989, Advanced Lithography.

Automated CD-SEM metrology for efficient TD and HVM

Alexander Starikov, Satya P. Mulapudi, 2008, SPIE Advanced Lithography.

Metrology of image placement

Alexander Starikov, 1998 .

Technique of the Choice of Parameters of Regulators of the Electromagnetic Bearing Taking Into Account Eddy Currents

Alexander Starikov, Irina Belyaeva, Yuriy Makarichev, 2016 .

Application of mark diagnostics to overlay metrology

Alexander Starikov, Grant Robertson, Norman H. Goodwin, 1992, Advanced Lithography.

Model-based WYSIWYG: dimensional metrology infrastructure for design and integration

Alexander Starikov, A. Starikov, 2002, SPIE Advanced Lithography.

Design and process integration for microelectronic manufacturing II : 26-28 February 2003, Santa Clara, California, USA

Alexander Starikov, 2003 .

Special Section Guest Editorial: Control of IC Patterning Variance Part 1: Metrology, Process Monitoring, and Control of Critical Dimension

Alexander Starikov, Matthew Sendelbach, 2015 .

Exposure monitor structure

Alexander Starikov, A. Starikov, 1990, Advanced Lithography.

Special Section Guest Editorial:Control of Integrated Circuit Patterning Variance, Part 2: Image Placement, Device Overlay, and Critical Dimension

Alexander Starikov, 2016 .

Design Rules for Real Patterns

Alexander Starikov, Santa Clara, Intel Corp, 2003 .

Accuracy of overlay measurements: tool and mark asymmetry effects

Alexander Starikov, Daniel J. Coleman, William A. Muth, 1992 .