Yongjie Hu

Effect of hydrogen content on dielectric strength of the silicon nitride film deposited by ICP-CVD*

H. Cui, Shiwei Zhuang, Kaidong Xu, 2021, Chinese Physics B.

Effects of combined coils on the uniformity of RF ion source

Shiwei Zhuang, Yudong Zhang, Yongjie Hu, 2022, Japanese Journal of Applied Physics.