Chih Hsuan Chao

Hotspot analysis and empirical correction through mask and wafer technology harmonization

James Cheng, Michael Green, Mohamed Ramadan, 2018, Photomask Technology.

Characterization of quartz etched depth and optical density of opaque pattern for the wafer CD behavior on advanced mask

James Cheng, Young Ham, William Chou, 2019, Photomask Technology.