L. Breaux

Comprehensive cost-effective photo defect monitoring strategy

D. Gudmundsson, R. K. Nurani, I. Peterson, 2001, 2001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. Conference Proceedings (Cat. No.01CH37203).

Automatic defect classification system for patterned semiconductor wafers

L. Breaux, B. Singh, 1995, Proceedings of International Symposium on Semiconductor Manufacturing.

Experimental studies of growth kinetics of silicon by remote plasma-enhanced chemical vapor deposition at low temperatures

Sanjay K. Banerjee, L. Breaux, Al F. Tasch, 1990, Other Conferences.

An innovative funnel and gate approach to groundwater remediation

M. L. Wilkey, L. Breaux, D. O. Johnson, 1996 .

Integration of automated defect classification into integrated circuit manufacturing

L. Breaux, J. Kawski, B. Singh, 1994, Proceedings of 1994 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (ASMC).

Homoepitaxial films grown on Si (100) at 150 °C by remote plasma‐enhanced chemical vapor deposition

L. Breaux, Al F. Tasch, B. Anthony, 1989 .