T. Aikawa

Nitridation behavior of sapphire using a carbon-saturated N2–CO gas mixture

K. Takada, H. Fukuyama, K. Hiraga, 2010 .

Influence of sputtering parameters on the crystallinity and crystal orientation of AlN layers deposited by RF sputtering using the AlN target

Hiroyuki Fukuyama, Hidekazu Kobatake, Makoto Ohtsuka, 2009 .