Vincent Astié

Direct Liquid Injection Chemical Vapor Deposition

C. Millon, A. Bartasyte, J. Decams, 2018, Chemical Vapor Deposition for Nanotechnology.

Relationship Processing–Composition–Structure–Resistivity of LaNiO3 Thin Films Grown by Chemical Vapor Deposition Methods

C. Millon, P. Boulet, S. Margueron, 2019, Coatings.

Ultralow‐k Amorphous Boron Nitride Based on Hexagonal Ring Stacking Framework for 300 mm Silicon Technology Platform

T. Lee, Chuanghan Hsu, M. Cao, 2022, Advanced Materials Technologies.

Conductive TiN thin films grown by plasma-enhanced atomic layer deposition: Effects of N-sources and thermal treatments

G. Gautier, M. Bechelany, M. Barr, 2023, Journal of Vacuum Science & Technology A.