M. Tanjyo
发表
S. Gotô,
Yoshifumi Ito,
S. Ohi,
1987
.
H. Onoda,
Y. Nakashima,
T. Nagayama,
2010,
2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology.
M. Hane,
S. Shishiguchi,
J. Borland,
2010,
2010 18th International Conference on Advanced Thermal Processing of Semiconductors (RTP).
H. Tsuji,
S. Sakai,
Y. Gotoh,
1995
.
H. Tsuji,
S. Sakai,
Y. Gotoh,
1995
.
K. Matsuda,
M. Tanjyo,
1996
.
S. Sakai,
M. Tanjyo,
M. Takahashi,
2001
.
N. Hamamoto,
M. Tanjyo,
S. Sakai,
2000,
2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 (Cat. No.00EX432).
Kohei Tanaka,
S. Sakai,
M. Naito,
2006
.
S. Sakai,
N. Hamamoto,
M. Tanjyo,
2002,
Ion Implantation Technology. 2002. Proceedings of the 14th International Conference on.
Y. Ohji,
Y. Nara,
T. Watanabe,
2008,
IEEE Transactions on Electron Devices.
M. Naito,
M. Tanjyo,
2011
.
T. Minato,
Y. Kawakami,
S. Goto,
1983
.
K. Sekar,
Y. Nakashima,
W. Krull,
2011
.
T. Aoyama,
Y. Nara,
S. Sakai,
2005
.
T. Aoyama,
T. Nagayama,
N. Hamamoto,
2006
.
S. Sakai,
T. Kobayashi,
T. Nagayama,
2002,
Ion Implantation Technology. 2002. Proceedings of the 14th International Conference on.
Y. Aso,
K. Hirano,
M. Tanjyo,
1982
.